The Chinese Academy of Sciences developed nanophotonics ultrafine processing system
The Chinese Academy of Sciences Technical Institute of physics and the Institute for instrument development project ” nanophotonics ultrafine processing system ” recently passed the Chinese Academy of Sciences Bureau of Comprehensive Planning Organization experts acceptance. The field processing test results show that, the development of nanophotonics ultrafine processing system with minimal processing resolution of less than 80 nm, processing and positioning accuracy of up to 10 nm, the largest processing range of up to 560 microns, with good three-dimensional processing capacity. Expert group thinks, the project according to the project contract requirements, complete the contract documents the various tasks, advanced technical index. This can be simultaneously provided with nanometer scale resolution and large scale processing laser processing system has not been reported, with innovation. In processing speed, range and accuracy in the international advanced level.
And metal materials, semiconductor materials, inorganic non-metallic materials to represent the features of hard materials are compared, with the organic polymer materials, inorganic organic composite materials, biological materials to represent the features of soft materials having specific optical design, electronics, magnetics, characteristics and functional diversity, tunable, is expected to include information, biological aspects of the various functional device applications. Compared with hard material, soft material in the processing of aspects, especially micro fine processing and the possibility of having the advantage, therefore, to realize the function of soft matter device characteristics and advantages, has a three-dimensional structure and function of the soft material device is one of the most promising breakthrough. The project developed, as in the nanometer scale to carry out organic polymer optoelectronic materials consisting mainly of three-dimensional devices research has established a high level of technical platform.
Nano photonics ultrafine processing system is a physicochemical by vision researchers are responsible for the completion of. He led the organic nano Photonics Research Group has successfully prepared by titanium dioxide, cadmium sulfide polymer nanocomposite three-dimensional photonic crystals, observed the photonic band gap of photonic crystal lasers, and mase behavior research progress, for micro nano scale optical photonics devices research has laid a good foundation.
